Label-free biosensors on silicon-on-insulator optical chips

Katrien De Vos; Peter Debackere; Tom Claes; Jordi Girones; Wout De Cort; Etienne Schacht; Roel G. Baets; Peter Bienstman

doi:10.1117/12.825648

21 August 2009 Label-free biosensors on silicon-on-insulator optical chips

Katrien De Vos, Peter Debackere, Tom Claes, Jordi Girones, Wout De Cort, Etienne Schacht, Roel G. Baets, Peter Bienstman

Author Affiliations +

Proceedings Volume 7397, Biosensing II; 739710 (2009) https://doi.org/10.1117/12.825648
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

To come up to the demand for extremely sensitive biosensors for parallel real-time bioanalyses, we present several configurations of label-free biosensors on Silicon-on-Insulator (SOI) optical chips. We discuss results on microring resonators with a non-fouling polymer coating, increased sensitivity with slotted wire resonators and the design and fabrication of an integrated surface plasmon resonance interferometer. The high refractive index contrast of SOI offers submicron-size features with high quality for dense integration, high sensitivity and detection with very low analyte volumes. The fabrication method, 193nm deep-UV lithography, allows for mass production of cheap disposable biochips.

Citation Download Citation

Katrien De Vos, Peter Debackere, Tom Claes, Jordi Girones, Wout De Cort, Etienne Schacht, Roel G. Baets, and Peter Bienstman "Label-free biosensors on silicon-on-insulator optical chips", Proc. SPIE 7397, Biosensing II, 739710 (21 August 2009); https://doi.org/10.1117/12.825648

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available