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Proceedings Article

Label-free biosensors on silicon-on-insulator optical chips

[+] Author Affiliations
Katrien De Vos, Peter Debackere, Tom Claes, Jordi Girones, Wout De Cort, Etienne Schacht, Roel G. Baets, Peter Bienstman

Univ. Gent (Belgium)

Proc. SPIE 7397, Biosensing II, 739710 (August 20, 2009); doi:10.1117/12.825648
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From Conference Volume 7397

  • Biosensing II
  • Manijeh Razeghi; Hooman Mohseni
  • San Diego, CA | August 02, 2009

abstract

To come up to the demand for extremely sensitive biosensors for parallel real-time bioanalyses, we present several configurations of label-free biosensors on Silicon-on-Insulator (SOI) optical chips. We discuss results on microring resonators with a non-fouling polymer coating, increased sensitivity with slotted wire resonators and the design and fabrication of an integrated surface plasmon resonance interferometer. The high refractive index contrast of SOI offers submicron-size features with high quality for dense integration, high sensitivity and detection with very low analyte volumes. The fabrication method, 193nm deep-UV lithography, allows for mass production of cheap disposable biochips.

© (2009) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Katrien De Vos ; Peter Debackere ; Tom Claes ; Jordi Girones ; Wout De Cort, et al.
"Label-free biosensors on silicon-on-insulator optical chips", Proc. SPIE 7397, Biosensing II, 739710 (August 20, 2009); doi:10.1117/12.825648; http://dx.doi.org/10.1117/12.825648


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