Effects of oxygen on structural, morphological, and optical properties of sputtered ZnO films on glass substrate

Y. P. Liao; Sh. X. Li; J. H. Zhang; H. Zhang; X. F. Li; Z. S. Guo

doi:10.1117/12.824513

20 August 2009 Effects of oxygen on structural, morphological, and optical properties of sputtered ZnO films on glass substrate

Y. P. Liao, Sh. X. Li, J. H. Zhang, H. Zhang, X. F. Li, Z. S. Guo

Author Affiliations +

Proceedings Volume 7404, Nanostructured Thin Films II; 74040D (2009) https://doi.org/10.1117/12.824513
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

The structural, morphological and optical properties of zinc oxide (ZnO) thin films were investigated. The ZnO thin films were deposited on glass substrate at room temperature (RT) through radio frequency magnetron sputtering in different O₂ flux (fixed Ar flux). The structural properties and morphology were studied by X-ray diffraction and atomic force microscopy, respectively. The highly crystallized ZnO thin films were obtained. It is found that all the films have preferential orientation in c-axis direction and the crystallinity of the films is strongly affected by O₂ flux. The crystallinity is improved greatly when the film is annealed in O₂ ambient. Atomic force microscopy results show that the films are compact and smooth. Near band edge emission peak in photoluminescence spectrum for the typical sample appears red-shift phenomena. All the films present a high transmittance of above 90% in the visible region.

Citation Download Citation

Y. P. Liao, Sh. X. Li, J. H. Zhang, H. Zhang, X. F. Li, and Z. S. Guo "Effects of oxygen on structural, morphological, and optical properties of sputtered ZnO films on glass substrate", Proc. SPIE 7404, Nanostructured Thin Films II, 74040D (20 August 2009); https://doi.org/10.1117/12.824513

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