Optical and electric properties of aluminum-gallium doped zinc oxide for transparent conducting film

Meng-Chi Li; Chien-Cheng Kuo; Sheng-Hui Chen; Cheng-Chung Lee

doi:10.1117/12.825206

20 August 2009 Optical and electric properties of aluminum-gallium doped zinc oxide for transparent conducting film

Meng-Chi Li, Chien-Cheng Kuo, Sheng-Hui Chen, Cheng-Chung Lee

Proceedings Volume 7409, Thin Film Solar Technology; 74090W (2009) https://doi.org/10.1117/12.825206
Event: SPIE Solar Energy + Technology, 2009, San Diego, California, United States

Abstract

The well-known indium-tin-oxide is not suitable for solar cell, because of the chemical reduction, even without any hydrogen dilution. The inexpensive and non-toxic of transparent conducting Aluminum and Gallium doped ZnO (AZO and GZO) thin films have been investigated for the substitutes for the indium-tin-oxide thin films. AZO performs high transmittance at visible region, however, higher resistance than GZO. In this study, AZO and GZO composed film (GAZO) will be fabricated using DC magnetron co-sputtering deposition system to achieve lower resistance than AZO and higher transmittance than GZO. The optical and electric properties of different thickness of GAZO such as transmittance, reflection, carrier concentration, Hall mobility, and resistivity will be measured and analyzed.

Citation Download Citation

Meng-Chi Li, Chien-Cheng Kuo, Sheng-Hui Chen, and Cheng-Chung Lee "Optical and electric properties of aluminum-gallium doped zinc oxide for transparent conducting film", Proc. SPIE 7409, Thin Film Solar Technology, 74090W (20 August 2009); https://doi.org/10.1117/12.825206

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available