Inductive edge sensors: an innovative solution for ELT segmented mirror alignment monitoring

Didier Rozière; Bruno Luong; Bernard Fuchs; Ambroise Périn; Christian Néel; Samuel Lévèque

doi:10.1117/12.789444

10 July 2008 Inductive edge sensors: an innovative solution for ELT segmented mirror alignment monitoring

Didier Rozière, Bruno Luong, Bernard Fuchs, Ambroise Périn, Christian Néel, Samuel Lévèque

Proceedings Volume 7012, Ground-based and Airborne Telescopes II; 701217 (2008) https://doi.org/10.1117/12.789444
Event: SPIE Astronomical Telescopes + Instrumentation, 2008, Marseille, France

Abstract

The largest telescopes (ELT) involve a highly segmented primary mirror. The monitoring of the mirror shape use thousands of sensors, located on segment edges, which measure the relative piston, tip and tilt of all segments. Today, telescopes with segmented primary mirrors use capacitance-based edge sensors. Although this technology offers excellent metrological performances, its practical use is limited by the intrinsic sensitivity to humidity, dust and condensation, whose effect exceeds the requirements for future ELTs. Being specialized in both capacitive and inductive metrology, Fogale nanotech has developed a novel concept of edge sensors using the inductive technology, which does not suffer from humidity, condensation, and dust effects. Cost effective sensor with specific layout, associated electronics, demonstrated metrological performance (sub-nanometer resolution and nanometer stability) that outperforms the capacitive concept.

Citation Download Citation

Didier Rozière, Bruno Luong, Bernard Fuchs, Ambroise Périn, Christian Néel, and Samuel Lévèque "Inductive edge sensors: an innovative solution for ELT segmented mirror alignment monitoring", Proc. SPIE 7012, Ground-based and Airborne Telescopes II, 701217 (10 July 2008); https://doi.org/10.1117/12.789444

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