We report a new system for measurement of the spatially resolved quantum efficiency (QE) of the semiconductor solarcells. In our method solar-cell is illuminated by modified liquid crystal display projector scanner. System allows to measure photo-current, and optical properties of the illuminated surface. The same system can be also used to measure surface topography of the wafer, its bow, and warp, and calculate lateral stress in the structure if structure cross-section is known.© (2008) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.