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Proceedings Article

Phase-shifting shadow moiré using the Carré algorithm

[+] Author Affiliations
Peisen S. Huang, Hong Guo

Stony Brook Univ. (USA)

Proc. SPIE 7066, Two- and Three-Dimensional Methods for Inspection and Metrology VI, 70660B (August 29, 2008); doi:10.1117/12.798175
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From Conference Volume 7066

  • Two- and Three-Dimensional Methods for Inspection and Metrology VI
  • Peisen S. Huang; Toru Yoshizawa; Kevin G. Harding
  • San Diego, California, USA | August 10, 2008

abstract

The difficulty of implementing the phase shifting method in shadow moiré lies in the fact that the phase shift due to the displacement of the light source, the imaging sensor, or the grating is non-uniform across the field of view. Typical phase shifting algorithms fail to produce accurate results. In the past few decades, various approximation methods have been developed to overcome this difficulty. In this paper, we describe an elegant solution that provides exact close-form result. In our proposed system, the grating is translated in equal steps to introduce phase shifts. The phase value at each point is determined by the Carré algorithm, which only requires uniform phase shifts for each point, instead of in the whole field of view. The 3-D shape of the object is then reconstructed from the phase map retrieved from the Carré algorithm. The simulation results demonstrate the effectiveness of the Carré algorithm for shadow moiré.

© (2008) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Peisen S. Huang and Hong Guo
"Phase-shifting shadow moiré using the Carré algorithm", Proc. SPIE 7066, Two- and Three-Dimensional Methods for Inspection and Metrology VI, 70660B (August 29, 2008); doi:10.1117/12.798175; http://dx.doi.org/10.1117/12.798175


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