Development of real-time shape measurement system using whole-space tabulation method

Motoharu Fujigaki; Akihiro Takagishi; Toru Matui; Yoshiharu Morimoto

doi:10.1117/12.795300

29 August 2008 Development of real-time shape measurement system using whole-space tabulation method

Motoharu Fujigaki, Akihiro Takagishi, Toru Matui, Yoshiharu Morimoto

Proceedings Volume 7066, Two- and Three-Dimensional Methods for Inspection and Metrology VI; 706606 (2008) https://doi.org/10.1117/12.795300
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

In this paper, a real-time shape measurement system using pixel-by-pixel calibration tables is developed. We proposed a shape measurement method using pixel-by-pixel calibration tables produced with multiple reference planes. In this method, all the relationships between the phase of the projected grating and the spatial coordinates can be obtained for each pixel. This method excludes a lens distortion and intensity errors of the projected grating in measurement results theoretically. Tabulation makes short-time measurement possible. The linearity of each pixel of a camera is also corrected using pixel-by-pixel calibration tables for linearity immediately after grabbing images.

Citation Download Citation

Motoharu Fujigaki, Akihiro Takagishi, Toru Matui, and Yoshiharu Morimoto "Development of real-time shape measurement system using whole-space tabulation method", Proc. SPIE 7066, Two- and Three-Dimensional Methods for Inspection and Metrology VI, 706606 (29 August 2008); https://doi.org/10.1117/12.795300

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available