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Proceedings Article

Development of real-time shape measurement system using whole-space tabulation method

[+] Author Affiliations
Motoharu Fujigaki, Akihiro Takagishi, Toru Matui, Yoshiharu Morimoto

Wakayama Univ. (Japan)

Proc. SPIE 7066, Two- and Three-Dimensional Methods for Inspection and Metrology VI, 706606 (August 29, 2008); doi:10.1117/12.795300
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From Conference Volume 7066

  • Two- and Three-Dimensional Methods for Inspection and Metrology VI
  • Peisen S. Huang; Toru Yoshizawa; Kevin G. Harding
  • San Diego, California, USA | August 10, 2008

abstract

In this paper, a real-time shape measurement system using pixel-by-pixel calibration tables is developed. We proposed a shape measurement method using pixel-by-pixel calibration tables produced with multiple reference planes. In this method, all the relationships between the phase of the projected grating and the spatial coordinates can be obtained for each pixel. This method excludes a lens distortion and intensity errors of the projected grating in measurement results theoretically. Tabulation makes short-time measurement possible. The linearity of each pixel of a camera is also corrected using pixel-by-pixel calibration tables for linearity immediately after grabbing images.

© (2008) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Motoharu Fujigaki ; Akihiro Takagishi ; Toru Matui and Yoshiharu Morimoto
"Development of real-time shape measurement system using whole-space tabulation method", Proc. SPIE 7066, Two- and Three-Dimensional Methods for Inspection and Metrology VI, 706606 (August 29, 2008); doi:10.1117/12.795300; http://dx.doi.org/10.1117/12.795300


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