Some studies on TiO2 films deposited by sol-gel technique

K. Narasimha Rao; M. Vishwas; Sudhir Kumar Sharma; K. V. Arjuna Gowda

doi:10.1117/12.799923

29 August 2008 Some studies on TiO₂ films deposited by sol-gel technique

K. Narasimha Rao, M. Vishwas, Sudhir Kumar Sharma, K. V. Arjuna Gowda

Proceedings Volume 7067, Advances in Thin-Film Coatings for Optical Applications V; 70670F (2008) https://doi.org/10.1117/12.799923
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

TiO2 films are extensively used in various applications including optical multi-layers, sensors, photo catalysis, environmental purification, and solar cells etc. These are prepared by both vacuum and non-vacuum methods. In this paper, we present the results on TiO2 thin films prepared by a sol-gel spin coating process in non-aqueous solvent. Titanium isopropoxide is used as TiO2 precursor. The films were annealed at different temperatures up to 3000 C for 5 hours in air. The influence of the various deposition parameters like spinning speed, spinning time and annealing temperature on the thickness of the TiO2 films has been studied. The variation of film thickness with time in ambient atmosphere was also studied. The optical, structural and morphological characteristics were investigated by optical transmittance-reflectance measurements, X-ray diffraction (XRD) and scanning electron microscopy (SEM) respectively. The refractive index and extinction coefficient of the films were determined by envelope technique and spectroscopic ellipsometry. TiO2 films exhibited high transparency (92%) in the visible region with a refractive index of 2.04 at 650 nm. The extinction coefficient was found to be negligibly small. The X-ray diffraction analysis showed that the TiO2 film deposited on glass substrate changes from amorphous to crystalline (anatase) phase with annealing temperature above 2500 C. SEM results show that the deposited films are uniform and crack free.

Citation Download Citation

K. Narasimha Rao, M. Vishwas, Sudhir Kumar Sharma, and K. V. Arjuna Gowda "Some studies on TiO₂ films deposited by sol-gel technique", Proc. SPIE 7067, Advances in Thin-Film Coatings for Optical Applications V, 70670F (29 August 2008); https://doi.org/10.1117/12.799923

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