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A polarization-sensitive optical coherence microscope (PS-OCM) has been developed to non-destructively measure
birefringence distribution at the surface and internal interfaces of multi-layer structures. The PS-OCM can make twodimensional
en face measurement by exploiting the parallel sensing capability of the CCD sensors. PS-OCM utilizes the
low coherence interference principle to enable the depth-resolved mapping of the birefringence distribution inside the
materials. By simultaneous detection of interference fringes in two orthogonal polarization states allows determination
of the Strokes parameters of light. Comparison of the Strokes parameters of the incident state to that reflected light from
the sample can yield a depth-resolved map of optical properties such as birefringence and refractive index. Because
many semiconductor and optic materials such as ceramic/wafer/polymer/glass are stress-induced birefringence materials,
changes in birefringence distribution may, for instance, indicate changes in material uniformity and stress inside the
materials. The PS-OCM has the capability to measure the spatial stress-field distribution of a material caused by the
residual stress or applied load. Using the high numerical aperture of the objective lens and the broad bandwidth of the
light source, the PS-OCM has the 1.5micrometer and 1.6 micrometer resolutions respectively in the lateral direction and
longitudinal (or depth) direction.
Jenq-Shyong Chen andYung-Kuo Huang
"Full-field mapping of the stress-induced birefringence using a polarized low coherence interference microscope", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71333I (12 January 2009); https://doi.org/10.1117/12.821246
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Jenq-Shyong Chen, Yung-Kuo Huang, "Full-field mapping of the stress-induced birefringence using a polarized low coherence interference microscope," Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71333I (12 January 2009); https://doi.org/10.1117/12.821246