Design of a probe for two-dimensional small angle detection

Haixia He; Xuanze Wang; Yuning Zhong; Liangen Yang; Hongduan Cao

doi:10.1117/12.807698

12 January 2009 Design of a probe for two-dimensional small angle detection

Haixia He, Xuanze Wang, Yuning Zhong, Liangen Yang, Hongduan Cao

Proceedings Volume 7133, Fifth International Symposium on Instrumentation Science and Technology; 71333W (2009) https://doi.org/10.1117/12.807698
Event: International Symposium on Instrumentation Science and Technology, 2008, Shenyang, China

Abstract

A novel two-dimensional small angle probe is introduced, which is based on principle of auto-collimation and utilizes quadrant Si-photoelectric detector (QPD) as detection device. AC modulation, AC magnification and absolute value demodulation are incorporated to restrain the DC excursion caused by background light and noise etc and to improve the sensitivity and stability of angle detection. To ensure that while the laser is shining, the current signal (converted into voltage signal) of QPD also is linear to the AC modulation voltage, this paper adopted AC modulation signal (5400Hz) with a DC offset. AC magnification circuit with reasonable parameters is designed to inhibit DC drift and the impact of industrial frequency noise and to ensure good amplification to signal frequency at the same time. A piezoelectric-driven micro-angle generator is designed to demarcate the angle. The calibration data are input to single chip, and the measurement of angles can be shown in SMC1602A.

Citation Download Citation

Haixia He, Xuanze Wang, Yuning Zhong, Liangen Yang, and Hongduan Cao "Design of a probe for two-dimensional small angle detection", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71333W (12 January 2009); https://doi.org/10.1117/12.807698

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