Nanometer-scale manipulator and ultrasonic cutter using an atomic force microscope controlled by a haptic device

F. Iwata; S. Kawanishi; A. Sasaki; H. Aoyama; T. Ushiki

doi:10.1117/12.821253

12 January 2009 Nanometer-scale manipulator and ultrasonic cutter using an atomic force microscope controlled by a haptic device

F. Iwata, S. Kawanishi, A. Sasaki, H. Aoyama, T. Ushiki

Author Affiliations +

Proceedings Volume 7133, Fifth International Symposium on Instrumentation Science and Technology; 71334E (2009) https://doi.org/10.1117/12.821253
Event: International Symposium on Instrumentation Science and Technology, 2008, Shenyang, China

Abstract

We describe a nanometer-scale manipulatoion and cutting method using ultrasonic oscillation scratching. The system is based on a modified atomic force microscope (AFM) coupled with a haptic device as a human interface. By handling the haptic device, the operator can directly move the AFM probe to manipulate nanometer scale objects and cut a surface while feeling the reaction from the surface in his or her fingers. As for manipulation using the system, nanometer-scale spheres were controllably moved by feeling the sensation of the AFM probe touching the spheres. As for cutting performance, the samples were prepared on an AT-cut quartz crystal resonator (QCR) set on an AFM sample holder. The QCR oscillates at its resonance frequency (9 MHz) with an amplitude of a few nanometers. Thus it is possible to cut the sample surface smoothly by the interaction between the AFM probe and the oscillating surface, even when the samples are viscoelastics such as polymers and biological samples. The ultrasonic nano-manipulation and cutting system would be a very useful and effective tool in the fields of nanometer-scale engineering and biological sciences.

Citation Download Citation

F. Iwata, S. Kawanishi, A. Sasaki, H. Aoyama, and T. Ushiki "Nanometer-scale manipulator and ultrasonic cutter using an atomic force microscope controlled by a haptic device", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71334E (12 January 2009); https://doi.org/10.1117/12.821253

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