Finite element analysis of the RF MEMS switch

Fu Zhao; Ping Wang; Yanjue Gong; Liang Lv; Zhang Lei

doi:10.1117/12.806684

2 February 2009 Finite element analysis of the RF MEMS switch

Fu Zhao, Ping Wang, Yanjue Gong, Liang Lv, Zhang Lei

Proceedings Volume 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications; 71590I (2009) https://doi.org/10.1117/12.806684
Event: International Conference of Optical Instrument and Technology, 2008, Beijing, China

Abstract

This paper takes the cantilever beam MEMS switch as an example to discuss mechanical principle and function simulation of the RF MEMS switch used in radio frequency communication. We select three kind s of the cantilever beams with different sections to analyze their switch characteristics, and with the help of finite element analysis(FEA) software ANSYS, multi-physical coupling analysis and simulation are carried out. The threshold voltage, the inherent frequency of these beams, optimal design, random vibration analysis and fatigue lifetime analysis are also discussed in detail. The results provide a good theoretical help to design various high performance RF MEMS switches with variational section beam.

Citation Download Citation

Fu Zhao, Ping Wang, Yanjue Gong, Liang Lv, and Zhang Lei "Finite element analysis of the RF MEMS switch", Proc. SPIE 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 71590I (2 February 2009); https://doi.org/10.1117/12.806684

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