Spatial phase-shifting lateral shearing interferometer

Xiaoxian Guo; Aijun Zeng; Huijie Huang

doi:10.1117/12.806931

2 February 2009 Spatial phase-shifting lateral shearing interferometer

Xiaoxian Guo, Aijun Zeng, Huijie Huang

Proceedings Volume 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications; 71602D (2009) https://doi.org/10.1117/12.806931
Event: International Conference of Optical Instrument and Technology, 2008, Beijing, China

Abstract

The phase-shifting lateral shearing interferometer is widely adopted for wavefront measurement with high accuracy. For real-time wavefront measurement, a spatial phase-shifting lateral shearing interferometer is proposed. The interferometer includes a polarization lateral shearing module, a spatial phase-shifting module and an imaging module. The polarization lateral shearing module consists of a Savart polariscope. The spatial phase-shifting module is component of a non-polarization beam splitter, a polarization beam splitter, two rectangular prisms and a half wave-plate. The imaging module includes an imaging system and a CCD. The measured wavefront is sheared by the polarization lateral shearing module. The polarization directions of the two shearing beams are perpendicular to each other. The two shearing beams are split into four groups of beams by the spatial phase-shifting module to form four interferograms in a 2x2 matrix. The phase step of the four interferograms is 90 degrees. The four interferograms are captured in a single frame image by the imaging module. In experiments, a spherical wavefront with large radius of curvature was measured. Four spatial phase-shifting interferograms of the wavefront was obtained simultaneously. The usefulness of the interferometer is verified.

Citation Download Citation

Xiaoxian Guo, Aijun Zeng, and Huijie Huang "Spatial phase-shifting lateral shearing interferometer", Proc. SPIE 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications, 71602D (2 February 2009); https://doi.org/10.1117/12.806931

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available