High average power 258nm generation in a nanosecond fiber MOPA system

Andreas Diening; Stuart McLean; Andrei Starodoumov

doi:10.1117/12.811211

19 February 2009 High average power 258nm generation in a nanosecond fiber MOPA system

Andreas Diening, Stuart McLean, Andrei Starodoumov

Proceedings Volume 7195, Fiber Lasers VI: Technology, Systems, and Applications; 71950H (2009) https://doi.org/10.1117/12.811211
Event: SPIE LASE: Lasers and Applications in Science and Engineering, 2009, San Jose, California, United States

Abstract

Quasi-cw UV light sources are of interest for replacing frequency-doubled Ar-Ion lasers in several applications. Our target application in semiconductor inspection requires a narrow bandwidth cw or quasi-cw source at 258nm, which cannot be achieved by frequency converting the output of a (modelocked) Neodymium-based laser. We developed a fiber MOPA system which operates at a high repetition rate of 5MHz and generates 1ns long pulses. The system consists of a low power oscillator and four consecutive amplifier stages. which boost the average power to 40W at 1031nm. The IR output of the fiber system is frequency doubled and quadrupled using LBO and CLBO crystals for SHG and FHG, respectively. We achieved SHG conversion efficiencies of up to 82% and a UV power of up to 14W.

Citation Download Citation

Andreas Diening, Stuart McLean, and Andrei Starodoumov "High average power 258nm generation in a nanosecond fiber MOPA system", Proc. SPIE 7195, Fiber Lasers VI: Technology, Systems, and Applications, 71950H (19 February 2009); https://doi.org/10.1117/12.811211

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