Nanostructure formation processes in femtosecond laser ablation of thin film surfaces

Godai Miyaji; Kenzo Miyazaki

doi:10.1117/12.807681

12 February 2009 Nanostructure formation processes in femtosecond laser ablation of thin film surfaces

Godai Miyaji, Kenzo Miyazaki

Proceedings Volume 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII; 720102 (2009) https://doi.org/10.1117/12.807681
Event: SPIE LASE: Lasers and Applications in Science and Engineering, 2009, San Jose, California, United States

Abstract

We have studied periodic nanostructure formation processes on hard thin film surfaces in femtosecond laser ablation. Using diamond-like carbon films patterned with submicrometer-size stripes, we found that the nanoscale ablation is preferentially initiated by the enhancement of a local field on the stripe surface having high curvature. Based on the experimental results for the initial stage of nanostructuring, it is concluded that the nanoscale ablation is initiated with the enhanced local field, and the periodicity is developed with the excitation of surface plasmon polaritons.

Citation Download Citation

Godai Miyaji and Kenzo Miyazaki "Nanostructure formation processes in femtosecond laser ablation of thin film surfaces", Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 720102 (12 February 2009); https://doi.org/10.1117/12.807681

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available