Polymeric nanosieves fabricated by UV lithography

Luis Gutierrez-Rivera; Lucila Cescato

doi:10.1117/12.808601

23 February 2009 Polymeric nanosieves fabricated by UV lithography

Proceedings Volume 7204, Micromachining and Microfabrication Process Technology XIV; 72040N (2009) https://doi.org/10.1117/12.808601
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

Sieves are membranes with a regular array of uniform pores that present low flow resistance. Because of such characteristics they are promising devices for filtration, separation of particles by size and drug delivery control. If the pore dimensions reach the scale of nanometers, new and exciting biological applications may be developed. We propose and demonstrated a technique for fabrication of polymeric sieves using only soft lithography that allows the mass production of sieves with pores in the scale of hundred of nanometers. The technique associates UV interference lithography, conventional optical lithography and molding. The process starts with the UV interference lithography in a thin SU-8 photoresist film, in order to record the small pores. After development, a thick SU-8 layer is coated, on the previously recorded sample, in order to pattern a hexagonal sustaining structure. The structures recorded in SU-8 are used to create a negative mold in PDMS (Polydimethylsiloxane) that is used for casting the sieve in PLLA (poly-Llactide).

Citation Download Citation

Luis Gutierrez-Rivera and Lucila Cescato "Polymeric nanosieves fabricated by UV lithography", Proc. SPIE 7204, Micromachining and Microfabrication Process Technology XIV, 72040N (23 February 2009); https://doi.org/10.1117/12.808601

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available