This paper reports on the fabrication of reproducible surface enhanced Raman scattering (SERS) device based on nanoPillar coupled with PC cavity by means of FIB milling and electron beam induced deposition techniques (Device 1): In addition to this device, another SERS device using e-beam lithography and electroless metal deposition techniques (Device 2) is fabricated in order to have planar geometry particularly useful for future nanoarray architectures SERS device. Various measurements have been performed for the monolayer of different materials showing extremely promising SERS based device. It is revealed that the Rhodamine6G is clearly evidenced in Raman 2D mapping spectrum, showing a very high enhancement in SERS signal in the order of 1012 (theoretically) with respect to the normal Raman measurements. We estimate the number of Rhodamine6G molecule detected is about 100-150.© (2009) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.