Fabrication of two-layer diffractive optical element for single-beam and single-exposure fabrication of diamond-like photonic crystal

Yuankun Lin; Ahmad Harb; Daniel Rodriguez; Karen Lozano; Di Xu; K. P. Chen

doi:10.1117/12.809626

24 February 2009 Fabrication of two-layer diffractive optical element for single-beam and single-exposure fabrication of diamond-like photonic crystal

Yuankun Lin, Ahmad Harb, Daniel Rodriguez, Karen Lozano, Di Xu, K. P. Chen

Author Affiliations +

Proceedings Volume 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II; 720515 (2009) https://doi.org/10.1117/12.809626
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

We report a new design and fabrication of an integrated two-layer phase mask for five-beam holographic fabrication of three-dimensional photonic crystal templates. The fabricated phase mask consists of two layers of orthogonally oriented gratings produced in a polymer. The vertical spatial separation between two layers produces a phase difference among diffractive laser beams, which has enabled a holographic fabrication of diamond-like photonic crystal templates through single-beam and single-exposure process. The reported method simplifies the fabrication of photonic crystals and is amendable for massive production and chip-scale integration of three-dimensional photonic structures.

Citation Download Citation

Yuankun Lin, Ahmad Harb, Daniel Rodriguez, Karen Lozano, Di Xu, and K. P. Chen "Fabrication of two-layer diffractive optical element for single-beam and single-exposure fabrication of diamond-like photonic crystal", Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 720515 (24 February 2009); https://doi.org/10.1117/12.809626

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