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Proceedings Article

Characterization of hybrid molding and lithography for SU-8 micro-optical components

[+] Author Affiliations
Aaron T. Cannistra, Thomas J. Suleski

The Univ. of North Carolina at Charlotte (USA)

Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 720517 (February 24, 2009); doi:10.1117/12.813463
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From Conference Volume 7205

  • Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II
  • Thomas J. Suleski; Winston V. Schoenfeld; Jian J. Wang
  • San Jose, CA | January 24, 2009

abstract

SU-8 is a very promising material for micro-optics. It is mechanically robust with high thermal and chemical resistance, has high transmission at visible and near-infrared wavelengths, and has relatively high refractive index after curing. While lithographic processing of SU-8 is relatively common, molding of SU-8 requires different processing parameters due to challenges with solvent removal and cross linking. Understanding the effects of the molding process on SU-8 is necessary to optimize performance of molded micro-optical components, and also to enable fabrication of more complex micro-optics through subsequent lithographic processing of molded structures. In this paper, we examine properties of SU-8 as it undergoes the molding process. General characterization of SU-8 shrinkage/expansion is presented, and minimum moldable feature sizes are explored. Solvent content and refractive index as functions of processing parameters are also examined, along with analysis of the SU-8's lithographic properties after undergoing the molding process. These characterizations further enable hybrid combinations of micro-molding and lithographic processing to fabricate complex micro-optics that are difficult or impossible to realize using conventional techniques.

© (2009) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Aaron T. Cannistra and Thomas J. Suleski
"Characterization of hybrid molding and lithography for SU-8 micro-optical components", Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 720517 (February 24, 2009); doi:10.1117/12.813463; http://dx.doi.org/10.1117/12.813463


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