Ion beam sputter deposition of zirconia thin films

Weihua Jin; Chunshui Jin; Lei Liu; Hongli Zhu; Huaijiang Yang

doi:10.1117/12.791117

12 March 2008 Ion beam sputter deposition of zirconia thin films

Weihua Jin, Chunshui Jin, Lei Liu, Hongli Zhu, Huaijiang Yang

Proceedings Volume 6624, International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing; 66241A (2008) https://doi.org/10.1117/12.791117
Event: International Symposium on Photoelectronic Detection and Imaging: Technology and Applications 2007, 2007, Beijing, China

Abstract

We determined the optical constants (the refractive index n and the extinction coefficient k) of ion beam sputter deposited zirconia thin films with spectroscopic ellipsometry (SE). First, we obtained the structure information (the layer thickness, surface roughness and layer diffusion) by fitting the grazing x-ray reflection (GXRR) spectra. The fitted surface roughness is verified by atomic force micrometer (AFM) measurement. Second, based on the acquired structure information, the measured ellipsometry spectra are fitted in the range of 240-800nm at an incident angle of 70.25 degree. The optical constants are solved based on the Tauc-Lorentz dispersion. The optical band gap extracted by SE is 4.79eV. Finally, the optical band gap is verified by Tauc plot method, which is well consistent with that of SE.

Citation Download Citation

Weihua Jin, Chunshui Jin, Lei Liu, Hongli Zhu, and Huaijiang Yang "Ion beam sputter deposition of zirconia thin films", Proc. SPIE 6624, International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing, 66241A (12 March 2008); https://doi.org/10.1117/12.791117

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