The fractal character of micromirror for metal MEMS optical switch

Yi Zhang; Yuan Luo; Xiaodong Xu

doi:10.1117/12.791060

12 March 2008 The fractal character of micromirror for metal MEMS optical switch

Yi Zhang, Yuan Luo, Xiaodong Xu

Proceedings Volume 6624, International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing; 662409 (2008) https://doi.org/10.1117/12.791060
Event: International Symposium on Photoelectronic Detection and Imaging: Technology and Applications 2007, 2007, Beijing, China

Abstract

In this paper, the topographies of various micro-mirror surfaces are measured by Scanning Tunneling Microscope (STM) based on the NiCrAu MEMS optical switch unit which is desined and fabricated by ourselves. Fractal theory and Weierstrass-Mandelbrot function is applied to analyze and simulate the topography of different surfaces. The result shows that the surface of MEMS micromirror which fabricated by metal sputter has low anisotropism and the W-M function is very efficient in creating models and is very useful in analysis the topography of MEMS surface.

Citation Download Citation

Yi Zhang, Yuan Luo, and Xiaodong Xu "The fractal character of micromirror for metal MEMS optical switch", Proc. SPIE 6624, International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing, 662409 (12 March 2008); https://doi.org/10.1117/12.791060

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