Influence of the size dispersion on the emission spectra of the hydrogen passivated Si nanoparticles in SiNx

Wenge Ding; Zhongxiu Hao; Wei Yu; Jiangyong Zhang; Yachao Li; Guangsheng Fu

doi:10.1117/12.791216

12 March 2008 Influence of the size dispersion on the emission spectra of the hydrogen passivated Si nanoparticles in SiNx

Wenge Ding, Zhongxiu Hao, Wei Yu, Jiangyong Zhang, Yachao Li, Guangsheng Fu

Author Affiliations +

Proceedings Volume 6624, International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing; 662425 (2008) https://doi.org/10.1117/12.791216
Event: International Symposium on Photoelectronic Detection and Imaging: Technology and Applications 2007, 2007, Beijing, China

Abstract

The influence of the size dispersion on the emission spectra of the hydrogen passivated silicon nanopaticles (Si NPs) in silicon nitride thin films, which are grown by helicon wave plasma-enhanced chemical vapor deposition (HWP-CVD) technique with SiH₄, H₂ and Ar-diluted 6.25% N₂ as the reactant gas sources, have been investigated. Transmission electron microscopy examination shows that Si NPs are isolated from the others by silicon nitride barriers and the sizes of Si NPs in silicon nitride matrix are distributed within a wide range. The luminescent due to quantum confinement effect of Si NPs embedded in the SiNx matrix was guaranteed by adding H₂ into film deposition process. The emission correlated to the defects such as excess silicon voids and nonradiative recombination centers have been suppressed and a strong PL with a wide band was observed. The photoluminescence (PL) spectra were investigated under different excitation energy (E_ex). It is shown that both the PL peak energy and their full width at half maximum (FWHM) show a decrease trend with decreasing the E_ex, and no obvious PL can be observed when the E_ex lower than a certain E_ex. And at high excitation energy contribution of the smaller particles in size becomes remarkable larger, thus it may be extremely difficult to correlate the PL spectra with the mean size of the Si NPs. These results are explained by quantum confinement effect model taking into account there existing a size distribution of Si NPs in the SiNx matrix.

Citation Download Citation

Wenge Ding, Zhongxiu Hao, Wei Yu, Jiangyong Zhang, Yachao Li, and Guangsheng Fu "Influence of the size dispersion on the emission spectra of the hydrogen passivated Si nanoparticles in SiNx", Proc. SPIE 6624, International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing, 662425 (12 March 2008); https://doi.org/10.1117/12.791216

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Silicon

Hydrogen

Nanoparticles

Silicon films

Transmission electron microscopy

Particles

Luminescence

Show All Keywords

Keywords/Phrases

Search In:

Publication Years