Differential-phase optical coherence reflectometer for surface profile measurement

Huan-Jang Huang; Wen-Chuan Kuo; Sheng-Yi Chang; Chien-Wa Ho; Chien Chou

doi:10.1117/12.728591

11 July 2007 Differential-phase optical coherence reflectometer for surface profile measurement

Huan-Jang Huang, Wen-Chuan Kuo, Sheng-Yi Chang, Chien-Wa Ho, Chien Chou

Proceedings Volume 6627, Optical Coherence Tomography and Coherence Techniques III; 66271K (2007) https://doi.org/10.1117/12.728591
Event: European Conferences on Biomedical Optics, 2007, Munich, Germany

Abstract

We developed a novel differential-phase optical coherence reflectometer (DP-OCR) by using a low-coherence light source and integrated with differential phase detection technique on surface profile measurement. In this setup, 2Å on detection of axial displacement was demonstrated. Thus, a localized surface profile was measured precisely by scanning an optical grating surface in this measurement. Moreover, the requirement on equal amplitude of the reference and signal beams of this novel reflectometer is discussed.

Citation Download Citation

Huan-Jang Huang, Wen-Chuan Kuo, Sheng-Yi Chang, Chien-Wa Ho, and Chien Chou "Differential-phase optical coherence reflectometer for surface profile measurement", Proc. SPIE 6627, Optical Coherence Tomography and Coherence Techniques III, 66271K (11 July 2007); https://doi.org/10.1117/12.728591

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