MEMS-based non-rotatory circumferential scanning optical probe for endoscopic optical coherence tomography

Yingshun Xu; Janak Singh; Teo Hui Siang; Kotlanka Ramakrishna; C. S. Premchandran; Chen Wei Sheng; Chuah Tong Kuan; Nanguang Chen; Malini C. Olivo; Colin J. R. Sheppard

doi:10.1117/12.726736

11 July 2007 MEMS-based non-rotatory circumferential scanning optical probe for endoscopic optical coherence tomography

Yingshun Xu, Janak Singh, Teo Hui Siang, Kotlanka Ramakrishna, C. S. Premchandran, Chen Wei Sheng, Chuah Tong Kuan, Nanguang Chen, Malini C. Olivo, Colin J. R. Sheppard

Author Affiliations +

Proceedings Volume 6627, Optical Coherence Tomography and Coherence Techniques III; 662715 (2007) https://doi.org/10.1117/12.726736
Event: European Conferences on Biomedical Optics, 2007, Munich, Germany

Abstract

In this paper, we present a non-rotatory circumferential scanning optical probe integrated with a MEMS scanner for in vivo endoscopic optical coherence tomography (OCT). OCT is an emerging optical imaging technique that allows high resolution cross-sectional imaging of tissue microstructure. To extend its usage to endoscopic applications, a miniaturized optical probe based on Microelectromechanical Systems (MEMS) fabrication techniques is currently desired. A 3D electrothermally actuated micromirror realized using micromachining single crystal silicon (SCS) process highlights its very large angular deflection, about 45 degree, with low driving voltage for safety consideration. The micromirror is integrated with a GRIN lens into a waterproof package which is compatible with requirements for minimally invasive endoscopic procedures. To implement circumferential scanning substantially for diagnosis on certain pathological conditions, such as Barret's esophagus, the micromirror is mounted on 90 degree to optical axis of GRIN lens. 4 Bimorph actuators that are connected to the mirror on one end via supporting beams and springs are selected in this micromirror design. When actuators of the micromirror are driven by 4 channels of sinusoidal waveforms with 90 degree phase differences, beam focused by a GRIN is redirected out of the endoscope by 45 degree tilting mirror plate and achieve circumferential scanning pattern. This novel driving method making full use of very large angular deflection capability of our micromirror is totally different from previously developed or developing micromotor-like rotatory MEMS device for circumferential scanning.

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Yingshun Xu, Janak Singh, Teo Hui Siang, Kotlanka Ramakrishna, C. S. Premchandran, Chen Wei Sheng, Chuah Tong Kuan, Nanguang Chen, Malini C. Olivo, and Colin J. R. Sheppard "MEMS-based non-rotatory circumferential scanning optical probe for endoscopic optical coherence tomography", Proc. SPIE 6627, Optical Coherence Tomography and Coherence Techniques III, 662715 (11 July 2007); https://doi.org/10.1117/12.726736

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