Measurements of linear sizes of relief elements in the nanometer range using an atomic force microscope

P. A. Todua; M. N. Filippov; V. P. Gavrilenko; Yu. A. Novikov; A. V. Rakov

doi:10.1117/12.733520

10 September 2007 Measurements of linear sizes of relief elements in the nanometer range using an atomic force microscope

P. A. Todua, M. N. Filippov, V. P. Gavrilenko, Yu. A. Novikov, A. V. Rakov

Author Affiliations +

Proceedings Volume 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing; 66480S (2007) https://doi.org/10.1117/12.733520
Event: NanoScience + Engineering, 2007, San Diego, California, United States

Abstract

The results of the study of image formation in atomic force microscope (AFM) are presented. Effects of the radius and the angular characteristics of the cantilever tip, as well as of the relief of the surface being studied, on the signal shape are discussed. Methods of AFM calibration, including the calibration of all three scales with the use of only one certified size of a test object and the measurement of the cantilever tip radius, are presented. Formulas are obtained that relate the sizes of trapezoidal structures to the sizes of the control intervals chosen in the AFM signals.

Citation Download Citation

P. A. Todua, M. N. Filippov, V. P. Gavrilenko, Yu. A. Novikov, and A. V. Rakov "Measurements of linear sizes of relief elements in the nanometer range using an atomic force microscope", Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480S (10 September 2007); https://doi.org/10.1117/12.733520

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