Polarization of grating diffraction simulated by vector Kirchhoff model

Soe-Mie Foeng Nee; Tsu-Wei Nee

doi:10.1117/12.733780

10 September 2007 Polarization of grating diffraction simulated by vector Kirchhoff model

Soe-Mie Foeng Nee, Tsu-Wei Nee

Proceedings Volume 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III; 66720J (2007) https://doi.org/10.1117/12.733780
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

The polarization of diffraction by a sawtooth reflection grating has been previously measured with fixed in and out directions while the grating was turned. The measured polarization and depolarization can provide more information about grating diffraction. The efficiency and polarization of diffraction by the two sawtooth facets are simulated based on the vector formulation of the Kirchhoff diffraction theory. The simulated diffraction pattern for the two-facet model agrees well with the measured one especially near the two specular peaks. The simulated diffraction polarization agrees with the measured one for diffraction orders with efficiency greater than 1%. For diffraction orders with efficiency < 1%, other diffraction mechanisms also come into place.

Citation Download Citation

Soe-Mie Foeng Nee and Tsu-Wei Nee "Polarization of grating diffraction simulated by vector Kirchhoff model", Proc. SPIE 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III, 66720J (10 September 2007); https://doi.org/10.1117/12.733780

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