Calibration of computer vision positioning system for MEMS wire bonder

Junlan Li; Yizhong Wang; Xingyu Zhao; Fanzhi Kong; Dawei Zhang

doi:10.1117/12.755234

4 January 2008 Calibration of computer vision positioning system for MEMS wire bonder

Junlan Li, Yizhong Wang, Xingyu Zhao, Fanzhi Kong, Dawei Zhang

Proceedings Volume 6836, MEMS/MOEMS Technologies and Applications III; 68360F (2008) https://doi.org/10.1117/12.755234
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

In this paper, a calibration method to improve the accuracy of MEMS Wire Bonder is presented. With the requirements of high accuracy and high speed in wire bonding, vision system has become one of important factors which influence the precision of MEMS packaging. It can be used as a feedback of control system to fulfill the requirement of accurate locating. A positioning system using computer vision technology has been designed to obtain high locating accuracy during wire bonding. The calibration of this system is the assurance to get distorting parameters and the relationship of all coordinate systems. Usually, Zhang's camera calibration method is widely used to get high accurate camera calibration results. But this method was only applied in normal imaging system. In this paper, the method is improved to be applied in micro-imaging system used for MEMS Wire Bonder. Combining the camera pinhole model and the Gauss lens law, the micro-imaging camera model is established. Certain smaller rotation angles are adopted to get acceptable calibration results. Simulations and experiments are performed to validate the proposed method with satisfied results.

Citation Download Citation

Junlan Li, Yizhong Wang, Xingyu Zhao, Fanzhi Kong, and Dawei Zhang "Calibration of computer vision positioning system for MEMS wire bonder", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360F (4 January 2008); https://doi.org/10.1117/12.755234

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available