EUV resist outgassing: scaling to HVM intensity

Alin O. Antohe; Chimaobi Mbanaso; Yu-Jen Fan; Leonid Yankulin; Rashi Garg; Petros Thomas; Gregory Denbeaux; Emil C. Piscani; Andrea F. Wuest

doi:10.1117/12.816555

18 March 2009 EUV resist outgassing: scaling to HVM intensity

Alin O. Antohe, Chimaobi Mbanaso, Yu-Jen Fan, Leonid Yankulin, Rashi Garg, Petros Thomas, Gregory Denbeaux, Emil C. Piscani, Andrea F. Wuest

Author Affiliations +

Proceedings Volume 7271, Alternative Lithographic Technologies; 727126 (2009) https://doi.org/10.1117/12.816555
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

Typical extreme ultraviolet (EUV) photoresist is known to outgas carbon-containing molecules, which is of particular concern to the industry as these molecules tend to contaminate optics and diminish reflectivity. This prompted extensive work to measure these species and the quantities that they outgas in a vacuum environment. Experiments were performed to test whether the outgassing rate of these carbon-containing molecules is directly proportional to the rate at which the EUV photons arrive and whether a very high power exposure will cause the same amount of outgassing as a much lower power exposure with the dose unchanged.

Citation Download Citation

Alin O. Antohe, Chimaobi Mbanaso, Yu-Jen Fan, Leonid Yankulin, Rashi Garg, Petros Thomas, Gregory Denbeaux, Emil C. Piscani, and Andrea F. Wuest "EUV resist outgassing: scaling to HVM intensity", Proc. SPIE 7271, Alternative Lithographic Technologies, 727126 (18 March 2009); https://doi.org/10.1117/12.816555

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available