Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Effect of line-width roughness on optical scatterometry measurements

[+] Author Affiliations
Brent C. Bergner

National Institute of Standards and Technology (USA) and The Univ. of North Carolina, Charlotte (USA) and K.T. Consulting, Inc. (USA)

Thomas A. Germer

National Institute of Standards and Technology (USA)

Thomas J. Suleski

The Univ. of North Carolina, Charlotte (USA)

Proc. SPIE 7272, Metrology, Inspection, and Process Control for Microlithography XXIII, 72720U (March 23, 2009); doi:10.1117/12.813770
Text Size: A A A
From Conference Volume 7272

  • Metrology, Inspection, and Process Control for Microlithography XXIII
  • John A. Allgair; Christopher J. Raymond
  • San Jose, California, USA | February 22, 2009

abstract

Line width roughness (LWR) has been identified as a potential source of uncertainty in scatterometry measurements, and characterizing its effect is required to improve the method's accuracy and to make measurements traceable. In this work, we extend previous work by using rigorous coupled wave (RCW) analysis on two-dimensionally periodic structures to examine the effects of LWR. We compare the results with simpler models relying upon a number of effective medium approximations. We find that the effective medium approximations yield an approximate order of magnitude indicator of the effect, but that the quantitative agreement may not be good enough to include in scatterometry models.

© (2009) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Brent C. Bergner ; Thomas A. Germer and Thomas J. Suleski
"Effect of line-width roughness on optical scatterometry measurements", Proc. SPIE 7272, Metrology, Inspection, and Process Control for Microlithography XXIII, 72720U (March 23, 2009); doi:10.1117/12.813770; http://dx.doi.org/10.1117/12.813770


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.