Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Reflective optics for sub-10nm hard X-ray focusing

[+] Author Affiliations
H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, T. Kimura, Y. Sano, K. Yamauchi

Osaka Univ. (Japan)

K. Tamasaku, Y. Nishino

SPring-8/Japan Synchrotron Radiation Research Institute (Japan)

M. Yabashi

SPring-8/RIKEN (Japan)

T. Ishikawa

SPring-8/Japan Synchrotron Radiation Research Institute (Japan) and SPring-8/RIKEN (Japan)

Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 67050L (September 20, 2007); doi:10.1117/12.734752
Text Size: A A A
From Conference Volume 6705

  • Advances in X-Ray/EUV Optics and Components II
  • Ali M. Khounsary; Christian Morawe; Shunji Goto
  • San Diego, CA | August 26, 2007

abstract

Nanofocused X-rays are indispensable because they can provide high spatial resolution and high sensitivity for X-ray nanoscopy/spectroscopy. A focusing system with reflective optics is one of the most promising methods for producing nanofocused X-rays due to its high efficiency and beams size. So, far we realize efficient hard X-ray focusing with a beam size of 25nm. Our next project is realization of sub-10nm hard X-ray focusing. Here, we describe the design of the graded multilayer mirror and evaluation method for hard X-ray focused beam.

© (2007) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

H. Mimura ; S. Matsuyama ; H. Yumoto ; S. Handa ; T. Kimura, et al.
"Reflective optics for sub-10nm hard X-ray focusing", Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 67050L (September 20, 2007); doi:10.1117/12.734752; http://dx.doi.org/10.1117/12.734752


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement


  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.