NanoHand: micro/nano system for automatic handling of nano-objects

S. Fatikow; V. Eichhorn; A. Steinecker; C. Meyer; L. Occhupinti; S. Fahlbusch; I. Utke; P. Bøggild; J.-M. Breguet; R. Kaufmann; M. Zadrazil; W. Barth

doi:10.1117/12.754400

10 October 2007 NanoHand: micro/nano system for automatic handling of nano-objects

S. Fatikow, V. Eichhorn, A. Steinecker, C. Meyer, L. Occhupinti, S. Fahlbusch, I. Utke, P. Bøggild, J.-M. Breguet, R. Kaufmann, M. Zadrazil, W. Barth

Author Affiliations +

Proceedings Volume 6717, Optomechatronic Micro/Nano Devices and Components III; 67170J (2007) https://doi.org/10.1117/12.754400
Event: International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland

Abstract

In the NanoHand project a system consisting of micro/nano based subsystems for automatic handling of nanometer sized objects like carbon nanotubes (CNTs) and nanowires (NWs) will be developed. The goals of the project are driven by the needs of upcoming semiconductor technology. Demonstrators will be built, which have a short term (a) as well as a long term (b) perspective: (a) automated decoration of scanning probe microscope (SPM) probes with (i) CNT-enabled supertips and (ii) supertips grown by focused electron beam induced deposition; (b) handling and assembly of CNTs for the construction of nanoelectronic devices. NanoHand aims to transfer results achieved in laboratories towards industrially applicable, automated handling system for nanoobjects and its applications. This paper reports the technical achievements of the first project year.

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S. Fatikow, V. Eichhorn, A. Steinecker, C. Meyer, L. Occhupinti, S. Fahlbusch, I. Utke, P. Bøggild, J.-M. Breguet, R. Kaufmann, M. Zadrazil, and W. Barth "NanoHand: micro/nano system for automatic handling of nano-objects", Proc. SPIE 6717, Optomechatronic Micro/Nano Devices and Components III, 67170J (10 October 2007); https://doi.org/10.1117/12.754400

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