Indium-tin oxide conductive films on flexible substrates deposited by the DC magnetron sputtering method

Nana Wang; Junsheng Yu; Hui Lin; Shuangling Lou; Yadong Jiang

doi:10.1117/12.830881

20 May 2009 Indium-tin oxide conductive films on flexible substrates deposited by the DC magnetron sputtering method

Nana Wang, Junsheng Yu, Hui Lin, Shuangling Lou, Yadong Jiang

Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 72821N (2009) https://doi.org/10.1117/12.830881
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Indium tin oxide (ITO) films on flexible polyethylene terephthalate (PET) substrates with low square resistivity and high transmittance in visible region are prepared by DC magnetron sputtering deposition method. The dependence of electrical property of ITO films on substrate temperature and DC power is compared using PET and glass substrates. The results imply that the change trend of electrical property of ITO films is similar no matter what kind of substrate is used. Using the ITO-coated substrates as anode, organic light-emitting devices (OLEDs) consisted of PET/ITO/NPB/Alq/Mg:Ag are fabricated. The electroluminescence performance of the flexible devices is comparable to the identical devices made of ITO-coated rigid glass substrates.

Citation Download Citation

Nana Wang, Junsheng Yu, Hui Lin, Shuangling Lou, and Yadong Jiang "Indium-tin oxide conductive films on flexible substrates deposited by the DC magnetron sputtering method", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72821N (20 May 2009); https://doi.org/10.1117/12.830881

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