Rim morphology of nanopore for studying single biomolecule

Kaige Wang; Qiang Li; Guiwen Xu; Aizi Jin; Changzhi Gu

doi:10.1117/12.832089

18 May 2009 Rim morphology of nanopore for studying single biomolecule

Kaige Wang, Qiang Li, Guiwen Xu, Aizi Jin, Changzhi Gu

Proceedings Volume 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 72840U (2009) https://doi.org/10.1117/12.832089
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

The fabrication and application of micro- and nanoscale containers and devices are recently attracted much attention. The top profiles of these nanoscale patterns are very important for nano-devices integration. The morphologies of small containers, nanopit and nanopore fabricated with focused ion beam (FIB) milling tool, are explored by atomic force microscopy (AFM). The topography of every pattern looks like a volcano. The protruded ring-shaped structures surrounding the crater are attributed to the swelling due to the amorphization when FIB processed the crystal silicon nitride (Si3N4) substrate. In addition, the morphologies of anodic alumina oxide (AAO) membranes fabricated by anodizing of metallic aluminum are discussed.

Citation Download Citation

Kaige Wang, Qiang Li, Guiwen Xu, Aizi Jin, and Changzhi Gu "Rim morphology of nanopore for studying single biomolecule", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840U (18 May 2009); https://doi.org/10.1117/12.832089

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