Material preparation methods and device fabrication technologies for realization of low loss periodically oriented GaAs waveguides are reported. Planar waveguide structures were grown by MOCVD on periodically patterned templates prepared by wafer bonding and selective layer removal. Ridge waveguides were designed and fabricated from the planar structures with emphasis on waveguide loss minimization. Record low losses of 2.0db/cm in periodically oriented waveguides and 0.95db/cm in single domain waveguides were measured. Routes for further loss reduction in patterned GaAs waveguides are discussed and initial results from further work to reduce waveguide corrugation are presented.© (2008) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.