Femtosecond laser for black silicon and photovoltaic cells

T. Sarnet; M. Halbwax; R. Torres; P. Delaporte; M. Sentis; S. Martinuzzi; V. Vervisch; F. Torregrosa; H. Etienne; L. Roux; S. Bastide

doi:10.1117/12.768516

15 February 2008 Femtosecond laser for black silicon and photovoltaic cells

T. Sarnet, M. Halbwax, R. Torres, P. Delaporte, M. Sentis, S. Martinuzzi, V. Vervisch, F. Torregrosa, H. Etienne, L. Roux, S. Bastide

Author Affiliations +

Proceedings Volume 6881, Commercial and Biomedical Applications of Ultrafast Lasers VIII; 688119 (2008) https://doi.org/10.1117/12.768516
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

We have prepared absorbing structures for photovoltaic cells with different nano-texturization, obtained by means of a femtosecond laser, without the use of corrosive gas (i.e. under vacuum). To take in account the 3D structured front surface, the emitter doping has been realized by using Plasma Immersion Ion Implantation (so-called PULSION). The results show a photocurrent increase up to 60 % in the laser texturized zones.

Citation Download Citation

T. Sarnet, M. Halbwax, R. Torres, P. Delaporte, M. Sentis, S. Martinuzzi, V. Vervisch, F. Torregrosa, H. Etienne, L. Roux, and S. Bastide "Femtosecond laser for black silicon and photovoltaic cells", Proc. SPIE 6881, Commercial and Biomedical Applications of Ultrafast Lasers VIII, 688119 (15 February 2008); https://doi.org/10.1117/12.768516

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