A perspective on the reliability of MEMS-based components for telecommunications

John C. McNulty

doi:10.1117/12.773640

18 February 2008 A perspective on the reliability of MEMS-based components for telecommunications

John C. McNulty

Author Affiliations +

Proceedings Volume 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII; 68840B (2008) https://doi.org/10.1117/12.773640
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

Despite the initial skepticism of OEM companies regarding reliability, MEMS-based devices are increasingly common in optical networking. This presentation will discuss the use and reliability of MEMS in a variety of network applications, from tunable lasers and filters to variable optical attenuators and dynamic channel equalizers. The failure mechanisms of these devices will be addressed in terms of reliability physics, packaging methodologies, and process controls. Typical OEM requirements will also be presented, including testing beyond of the scope of Telcordia qualification standards. The key conclusion is that, with sufficiently robust design and manufacturing controls, MEMS-based devices can meet or exceed the demanding reliability requirements for telecommunications components.

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John C. McNulty "A perspective on the reliability of MEMS-based components for telecommunications", Proc. SPIE 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII, 68840B (18 February 2008); https://doi.org/10.1117/12.773640

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KEYWORDS

Microelectromechanical systems

Reliability

Tunable lasers

Actuators

Semiconducting wafers

Tunable filters

Silicon

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