Confocal microscopy scanned by digital micromirror device with stray light filters

Chuan-Cheng Hung; Chang-Ching Lin; Koung-Ming Yeh; Yi-Chin Fang; Jia-Hua Wu; Hung-Chi Sun; Wei-Chi Lai; Yi-Liang Chen

doi:10.1117/12.758830

19 February 2008 Confocal microscopy scanned by digital micromirror device with stray light filters

Chuan-Cheng Hung, Chang-Ching Lin, Koung-Ming Yeh, Yi-Chin Fang, Jia-Hua Wu, Hung-Chi Sun, Wei-Chi Lai, Yi-Liang Chen

Proceedings Volume 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII; 68840T (2008) https://doi.org/10.1117/12.758830
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

This research proposes a newly developed stray light filter, which might significantly eliminate the stray light and ghost image effect for the non-contact con-focal microscopy system handled by (Digital Micromirror Device, DMD) devise. DMD devise, which was introduced by Taxes instrument under advanced technology of Micro-Electro-Mechanical Systems, MEMS, could be the replacement of traditional scanning system. The employment of DMD system takes advantages of fast scanning rate, better resolution, simplifies optical system. However, traditional confocal microscopy system with pinhole will lead to light starving and potentially higher signal to noise ratio. Without pinhole, the stray light and ghost image effect might complicate the signal measurement. A newly developed stray light filter will be presented in this research in order to eliminate the potential stray light and ghost image without sacrifice of luminance. It indicated that not only optical system could be much simplified but also resolution could be one step higher because neither pinhole nor CCD camera lens will be employed in this system. Experimental results will be shown in this research demonstrating an increase in contrast up to 60%.

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Chuan-Cheng Hung, Chang-Ching Lin, Koung-Ming Yeh, Yi-Chin Fang, Jia-Hua Wu, Hung-Chi Sun, Wei-Chi Lai, and Yi-Liang Chen "Confocal microscopy scanned by digital micromirror device with stray light filters", Proc. SPIE 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII, 68840T (19 February 2008); https://doi.org/10.1117/12.758830

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KEYWORDS

Stray light

Confocal microscopy

Digital micromirror devices

Optical filters

Image filtering

CCD cameras

Imaging systems

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