Fast three-dimensional simulation of buried EUV mask defect interaction with absorber features

Chris H. Clifford; Andrew R. Neureuther

doi:10.1117/12.746486

30 October 2007 Fast three-dimensional simulation of buried EUV mask defect interaction with absorber features

Proceedings Volume 6730, Photomask Technology 2007; 67301S (2007) https://doi.org/10.1117/12.746486
Event: SPIE Photomask Technology, 2007, Monterey, California, United States

Abstract

To simulate the interaction of buried defects and absorber features in EUV masks, a full three-dimensional, fast, integrated, simulator based on ray tracing and a thin mask model is presented. This simulator allows rapid assessment of the effects of buried defects on EUV printing. This new simulator, RADICAL (Rapid Absorber Defect Interaction Computation for Advanced Lithography), gives a 450X speed increase compared to FDTD, and matches FDTD within 1.5nm for predicting CD change due to a buried defect. RADICAL consists of three sequential steps: the propagation of the mask illumination down through the absorber pattern, the reflection off the defective multilayer, and the propagation back up through the absorber. A propagated thin mask model is used to model the down/up propagation through the absorber pattern and a ray tracing simulator is used for the multilayer reflection. These simulators are linked together using a Fourier transform to convert the near field output of one simulator step into a set of plane wave inputs for the next.

Citation Download Citation

Chris H. Clifford and Andrew R. Neureuther "Fast three-dimensional simulation of buried EUV mask defect interaction with absorber features", Proc. SPIE 6730, Photomask Technology 2007, 67301S (30 October 2007); https://doi.org/10.1117/12.746486

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available