Paper
30 March 2009 On nonuniform resonator sensors
Dumitru I. Caruntu, Karen Lozano, Arturo Fuentes, Jesus Netro
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Abstract
Mass deposition influence on natural frequencies of nonuniform cantilever resonator sensors of linear and parabolic thickness is investigated in this paper. Resonator sensitivity, defined as a fraction of change in frequency per deposited mass, is found. Constant thickness mass deposition on all four lateral surfaces of the cantilever of rectangular crosssection was assumed. The Euler-Bernoulli theory was used under the assumption that the beams are slender. Mass deposition on the free end surface of the beams was neglected. The deposition thickness was considered uniform and very small compared to any beam dimension. The deposited mass had no contribution to the stiffness, only to the mass. Results show that when compared to the sensitivity of uniform resonator, the sensitivity of linear thickness resonator and parabolic thickness resonator are in the first mode 6 times and 3 times higher, respectively.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dumitru I. Caruntu, Karen Lozano, Arturo Fuentes, and Jesus Netro "On nonuniform resonator sensors", Proc. SPIE 7292, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2009, 72922N (30 March 2009); https://doi.org/10.1117/12.822831
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Cited by 3 scholarly publications.
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KEYWORDS
Sensors

Resonators

Finite element methods

Silicon

Dielectrophoresis

Beam shaping

Crystals

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