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Proceedings Article

Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

[+] Author Affiliations
Saulius Juodkazis, Koichi Nishimura, Hiroaki Misawa

Hokkaido Univ. (Japan)

Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo

The Univ. of Tokushima (Japan)

Satoru Tanaka

Kyushu Univ. (Japan)

Proc. SPIE 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, 67320B (June 28, 2007); doi:10.1117/12.751889
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From Conference Volume 6732

  • International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies
  • Vladislav Y. Panchenko; Oleg A. Louchev; Sergei Malyshev
  • Minsk, Belarus | May 28, 2007

abstract

We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

© (2007) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Saulius Juodkazis ; Koichi Nishimura ; Hiroki Okuno ; Yusuke Tabuchi ; Shigeki Matsuo, et al.
"Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics", Proc. SPIE 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, 67320B (June 28, 2007); doi:10.1117/12.751889; http://dx.doi.org/10.1117/12.751889


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