MEMS-based tunable filters for compact IR spectral imaging

William Gunning; Stefan Lauxtermann; Hakan Durmas; Min Xu; Philip Stupar; Robert Borwick; Donald Cooper; Paul Kobrin; Miikka Kangas; Jeffrey DeNatale; William Tennant

doi:10.1117/12.819017

6 May 2009 MEMS-based tunable filters for compact IR spectral imaging

William Gunning, Stefan Lauxtermann, Hakan Durmas, Min Xu, Philip Stupar, Robert Borwick, Donald Cooper, Paul Kobrin, Miikka Kangas, Jeffrey DeNatale, William Tennant

Author Affiliations +

Proceedings Volume 7298, Infrared Technology and Applications XXXV; 72982I (2009) https://doi.org/10.1117/12.819017
Event: SPIE Defense, Security, and Sensing, 2009, Orlando, Florida, United States

Abstract

Arrays of independently tunable MEMS Fabry-Perot filters have been developed that enable spectral tuning over the range of 11 - 8 microns with a filter bandwidth of ~ 120 nm. Actuation is provided using a MEMS driver IC that is hybridized to the MEMS chip. Combining the filter array with an IR FPA enables spatially-resolved spectral tuning in a compact architecture. Tunable spectral response data from the first integrated tunable filter / FPA device are presented.

Citation Download Citation

William Gunning, Stefan Lauxtermann, Hakan Durmas, Min Xu, Philip Stupar, Robert Borwick, Donald Cooper, Paul Kobrin, Miikka Kangas, Jeffrey DeNatale, and William Tennant "MEMS-based tunable filters for compact IR spectral imaging", Proc. SPIE 7298, Infrared Technology and Applications XXXV, 72982I (6 May 2009); https://doi.org/10.1117/12.819017

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