On electrostatically actuated NEMS/MEMS circular plates

Dumitru I. Caruntu; Iris Alvarado

doi:10.1117/12.882033

13 April 2011 On electrostatically actuated NEMS/MEMS circular plates

Dumitru I. Caruntu, Iris Alvarado

Proceedings Volume 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011; 79810Z (2011) https://doi.org/10.1117/12.882033
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2011, San Diego, California, United States

Abstract

This paper deals with electrostatically actuated micro and nano-electromechanical (MEMS/NEMS) circular plates. The system under investigation consists of two bodies, a deformable and conductive circular plate placed above a fixed, rigid and conductive ground plate. The deformable circular plate is electrostatically actuated by applying an AC voltage between the two plates. Nonlinear parametric resonance and pull-in occur at certain frequencies and relatively large AC voltage, respectively. Such phenomena are useful for applications such as sensors, actuators, switches, micro-pumps, micro-tweezers, chemical and mass sensing, and micro-mirrors. A mathematical model of clamped circular MEMS/NEMS electrostatically actuated plates has been developed. Since the model is in the micro- and nano-scale, surface forces, van der Waals and/or Casimir, acting on the plate are included. A perturbation method, the Method of Multiple Scales (MMS), is used for investigating the case of weakly nonlinear MEMS/NEMS circular plates. Two time scales, fast and slow, are considered in this work. The amplitude-frequency and phase-frequency response of the plate in the case of primary resonance are obtained and discussed.

Citation Download Citation

Dumitru I. Caruntu and Iris Alvarado "On electrostatically actuated NEMS/MEMS circular plates", Proc. SPIE 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011, 79810Z (13 April 2011); https://doi.org/10.1117/12.882033

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