Paper
25 September 2007 Guided-mode resonance sensor with extended spatial sensitivity
David Fattal, Mike Sigalas, Anna L. Pyayt, Zhiyong Li, Raymond G. Beausoleil
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Abstract
We propose a novel design for a guided-mode resonance (GMR) grating sensor that extends the sensitivity to a large region of space, possibly several tens of microns away from the grating surface. This type of sensors has high sensitivity in the half-space above the grating, close to the theoretical limit, together with a controllable - potentially very high - quality factor. It relies on a resonance caused by a "confined" mode of a sub-wavelength thick grating slab, a mode that is largely expelled from the grating itself into the grating environment. The small thickness assumption allows us to derive a simple yet accurate analytical model for the sensor behavior, which is tested numerically using a rigorous coupled-wave analysis (RCWA) method as well as in preliminary grating transmission measurements.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David Fattal, Mike Sigalas, Anna L. Pyayt, Zhiyong Li, and Raymond G. Beausoleil "Guided-mode resonance sensor with extended spatial sensitivity", Proc. SPIE 6766, Optoelectronic Devices: Physics, Fabrication, and Application IV, 67660J (25 September 2007); https://doi.org/10.1117/12.731942
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Cited by 11 scholarly publications.
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KEYWORDS
Sensors

Glasses

Dielectrics

Optical design

Silicon

Metals

Liquids

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