Replicated multilayer x-ray mirrors

Ladislav Pina; Adolf Inneman; Rene Hudec; Hana Ticha; Yuriy Ya Platonov

doi:10.1117/12.507975

13 January 2004 Replicated multilayer x-ray mirrors

Ladislav Pina, Adolf Inneman, Rene Hudec, Hana Ticha, Yuriy Ya Platonov

Proceedings Volume 5193, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications; (2004) https://doi.org/10.1117/12.507975
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

We report on the progress in innovative X-ray mirror development with focus on deposition and replication of multilayers. These mirrors are expected to find applications in the fields of X-ray astrophysics as well as in various fields in the laboratory.

Citation Download Citation

Ladislav Pina, Adolf Inneman, Rene Hudec, Hana Ticha, and Yuriy Ya Platonov "Replicated multilayer x-ray mirrors", Proc. SPIE 5193, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, (13 January 2004); https://doi.org/10.1117/12.507975

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