Generation of soft x-rays and extreme-ultraviolet (EUV) radiation using a laser-irradiated gas puff target

Henryk Fiedorowicz

doi:10.1117/12.520124

6 October 2003 Generation of soft x-rays and extreme-ultraviolet (EUV) radiation using a laser-irradiated gas puff target

Henryk Fiedorowicz

Author Affiliations +

Proceedings Volume 5229, Laser Technology VII: Applications of Lasers; (2003) https://doi.org/10.1117/12.520124
Event: Laser Technology VII: Applications of Lasers, 2002, Szczecin, Poland

Abstract

Investigations on soft x-ray and extreme ultraviolet (EUV) emissions from a gas puff target irradiated with high-power laser pulses are presented. The aim of the studies is to develop efficient and debris-free laser plasma x-ray and EUV sources for applications in microscopy, lithography and microtechnology. Recent studies on soft x-ray and EUV lasers generated using an elongated gas puff target irradiated with picosecond pulses are presented as well.

Citation Download Citation

Henryk Fiedorowicz "Generation of soft x-rays and extreme-ultraviolet (EUV) radiation using a laser-irradiated gas puff target", Proc. SPIE 5229, Laser Technology VII: Applications of Lasers, (6 October 2003); https://doi.org/10.1117/12.520124

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