Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm

Olaf T. A. Janssen; Sven van Haver; Augustus J. E. M. Janssen; Joseph J. M. Braat; H. Paul Urbach; Silvania F. Pereira

doi:10.1117/12.772497

7 March 2008 Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm

Olaf T. A. Janssen, Sven van Haver, Augustus J. E. M. Janssen, Joseph J. M. Braat, H. Paul Urbach, Silvania F. Pereira

Author Affiliations +

Proceedings Volume 6924, Optical Microlithography XXI; 692410 (2008) https://doi.org/10.1117/12.772497
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

Results are presented of mask imaging using the Extended Nijboer-Zernike (ENZ) theory of diffraction. We show that the efficiency of a mask imaging algorithm, derived from this theory, can be increased. By adjusting the basic Finite Difference Time Domain (FDTD) algorithm, we can calculate the near field of isolated mask structures efficiently, without resorting to periodic domains. In addition, the calculations for the points on the entrance sphere of the imaging system can be done separately with a Fourier transformed Stratton-Chu nearto- far-field transformation. By clever sampling in the radial direction of the entrance pupil, the computational effort is already reduced by at least a factor of 4.

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Olaf T. A. Janssen, Sven van Haver, Augustus J. E. M. Janssen, Joseph J. M. Braat, H. Paul Urbach, and Silvania F. Pereira "Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm", Proc. SPIE 6924, Optical Microlithography XXI, 692410 (7 March 2008); https://doi.org/10.1117/12.772497

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