MOEMS Gyroscope based on acoustooptic mode coupling

Shu-xiang Lu; Shu-fen Chen; Yi Zhao

doi:10.1117/12.888635

3 January 2011 MOEMS Gyroscope based on acoustooptic mode coupling

Shu-xiang Lu, Shu-fen Chen, Yi Zhao

Proceedings Volume 7990, Optical Sensors and Biophotonics II; 79900I (2011) https://doi.org/10.1117/12.888635
Event: Asia Communications and Photonics Conference and Exhibition, 2010, Shanghai, Shanghai, China

Abstract

A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg^-1s^-1 in the angular rate range of 0-400deg/s.

Citation Download Citation

Shu-xiang Lu, Shu-fen Chen, and Yi Zhao "MOEMS Gyroscope based on acoustooptic mode coupling", Proc. SPIE 7990, Optical Sensors and Biophotonics II, 79900I (3 January 2011); https://doi.org/10.1117/12.888635

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