A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg-1s-1 in the angular rate range of 0-400deg/s.© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.