The effective lifetime of optics is limited by both laser-induced damage and the subsequent growth of laser initiated damage sites. We have measured the growth rate of laser-induced damage in fused silica in both air and vacuum at 527 nm. For damage on the exit surface, the data shows exponential growth in the lateral size of the damage site with shot number. The exponential growth coefficient depends linearly on the laser fluence. The behavior at the fluence threshold for growth is contrasted to that observed at 351 nm. The growth rate was not significantly affected by either the wavelength of the initiating fluence or the presence of 10 torr of air as compared to vacuum. When the damage is located on the input surface, it has both a higher threshold for growth and does not grow exponentially.© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.