Performance of a novel non-planar diaphragm and its application to optical sensing devices

Weijun Wang; Rongming Lin; Da Gang Guo; Tie Tun Sun

doi:10.1117/12.521287

2 April 2004 Performance of a novel nonplanar diaphragm and its application to optical sensing devices

Weijun Wang, Rongming Lin, Da Gang Guo, Tie Tun Sun

Proceedings Volume 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III; (2004) https://doi.org/10.1117/12.521287
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

We present a new single-chip diaphragm-type Fabry-Perot microcavity pressure sensor with a novel single deeply corrugated diaphragm. Both analytical and experimental results have shown that some common issues, such as signal-averaging effect and cross-sensitivity to temperature with diaphragm-type Fabry-Perot microcavity pressure sensors, can be substantially alleviated by the proposed technique.

Citation Download Citation

Weijun Wang, Rongming Lin, Da Gang Guo, and Tie Tun Sun "Performance of a novel nonplanar diaphragm and its application to optical sensing devices", Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); https://doi.org/10.1117/12.521287

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