The 3D particle-in-sell (PIC) simulations of interaction of short high-intense laser pulses with solid state targets (ultrathin double-layer foils and homogeneous targets consisted of heavy and light ions) and low-density targets (dense gas jets or aerogels) have been performed. It has been shown that gas jet targets have no any advantage in comparison with ultrathin foils in terms of maximum proton energy and spectrum quality. The utilization of mass-limited foil of submicron thickness allows one to increase efficiency of high-energy particles production. As a result, the mono-energetic proton beams with energy of hundreds mega-electron-volts can be generated by the laser pulses with energy of the order of tens of joules. The best performance of the ion sources discussed is achieved by proper matching of laser pulse intensity, pulse duration, focal spot size and target density.© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.